The closed field magnetron (CFM) reactive magnetron sputtering systems are designed specifically for the deposition of precision single and multilayer optical coatings. The design is such that all samples are in the same deposition and plasma environment. Coating quality is assured by the use of the “closed field” configuration and magnetron sources, which create an intense plasma and high ion current density at the substrates.
Downloads
CFM 650 Footprint pdf
CFM 650 System Manual pdf