Thin film inorganic photovoltaics is an exciting technology for enabling clean and low cost generation of solar electricity. Suitable thin film absorber layers include CdTe, CIGS and a-Si. Applied Multilayers offers a range of batch systems for Thin film PV on both glass and polymer sheet substrates. The CFM process with its high plasma density and low bias Voltages can be used to remove or reduce the high temperature requirement for some of the crucial processes. Machines can be provided with 4, 6 or 8 linear magnetrons to provide options for all the materials required. Evaporation sources or K-cells can also be included. The larger systems can even be equipped with final stage metal patterning.
Advantages of the CFM process for thin film photovoltaics include
- Low temperature deposition of super-smooth ITO to minimize shunting
- Low temperature process for low stress coatings suitable for applying to polymer sheet.
- Fast pump-down and retractable substrate drum for fast throughput.
- Highly flexible process conditions to optimize thin film microstructure.
- Availability of CdS, CdTe, ITO magnetron targets etc.
- The CFM process can be used to deposit silicon nitride or oxy-nitride as an anti-reflecting encapsulation layer.
