Applications

Applied Multilayers patented closed field magnetron sputtering is designed for deposition of precision optics coatings offering multifunctional optical filters and capability to deposit both discrete multilayered films and graded index layered filters.

Intermediate refractive indices can be obtained by sputtering simultaneously two or more targets with given ratios or controlling reactive gas partial pressures.

Essential features for precision optics application include:

• Multiple targets can be incorporated: 2 targets – CFM450, 4 targets – CFM650, 6 targets – CFM850, 8 targets CFM1000. Deposited coating include metals, transparent conductive oxides, metal oxides, nitrides and carbides making it possible to produce a wide variety of coatings.
• Ultra-smooth low stress coatings as a result of optimal ion current density/ ion energy from CFM configuration
• Refractive indices typically close to that of the bulk material.
• No secondary plasma source or loadlock required simplifying production implementation.
• Unique material sputter deposition for broadband infra-red materials based on germanium carbon and hard carbon.
• Drum configuration to allow coating of flat, curved or flexible sheet. Drum configuration allows for rapid switch over of drums
• Worldwide sales achieved into a broad range of precision optical coating applications

Traditionally, physical vapour deposition techniques are utilised including electron beam deposition and evaporation. Closed field magnetron sputter deposition is rapidly emerging as a preferred alternative for deposition of precision optical coatings in a wide range of applications.